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filingDate 1997-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a659346b035e599c995b6c11803a9198
publicationDate 2003-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003127118-A1
titleOfInvention Cleaning gas
abstract The present invention provides a chamber cleaning gas for Si film, SiO 2 film, Si 3 N 4 film or high-melting metal silicite film, the gas comprising at least one gas selected from the group consisting of CF 3 CF═CF 2 , n n n and provides a chamber cleaning method.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011117751-A1
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priorityDate 1996-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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