| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
2001-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5446de3bbf42b56147cba26c946675c |
| publicationDate |
2003-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003082906-A1 |
| titleOfInvention |
Via formation in polymers |
| abstract |
A method for forming relatively small vias in polymers which may have an underlying layer is disclosed. In a first embodiment, plated pillars are formed on a plated bottom metal layer. A polymer is coated over the first metal layer and the plated pillars and cured. The polymer is blanket etched to expose the top surface of the plated pillars. A metal layer is formed on top of the polymer layer and exposed surfaces of the plated pillars. In a second embodiment of the invention, pillars made from a photoresist are formed over a bottom metal layer. A polymer layer is coated over the pillars and the bottom metal layer and blanket etched to the surface of the photoresist pillar. The photoresist pillars are then removed forming vias. A top metal layer is formed on top of the polymer coating in the vias to connect to the bottom metal layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023170273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10305029-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543262-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008105647-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7413978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9546431-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004009629-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010270165-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10676836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005208871-A1 |
| priorityDate |
2001-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |