| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-3155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D11-138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-42 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D11-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-42 |
| filingDate |
2002-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2562bf63c99b164a20ed7a1d91f0237a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bc2ebc29d8da2082ac1a386b177faf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bc7556e7e16a985b9f8245c7143a1ba |
| publicationDate |
2003-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003020907-A1 |
| titleOfInvention |
Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopy |
| abstract |
Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004068127-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018007569-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1660954-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1660954-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004159399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2270471-A1 |
| priorityDate |
2001-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |