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publicationDate 2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002182874-A1
titleOfInvention Method for forming hybrid low-k film stack to avoid thermal stress effect
abstract A method for forming hybrid low-k film stack is disclosed, in which an organic spin-on low-k material and CVD low-k material are combined to avoid thermal stress effect. This invention also provides a method for applying hybrid low-k film stack to dual damascene process.
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