| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-1293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3563 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B23-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2001-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b139d0bb39d4bc2668e490553fe222bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d593c76aa8e7be50612688a7433d283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ad95559e71e5d0dcd19474a7c0fa962
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66d285747e050f151d34abc976d151d1 |
| publicationDate |
2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2002055259-A1 |
| titleOfInvention |
Method and apparatus for monitoring a process by employing principal component analysis |
| abstract |
A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process). Principal component analysis then is performed on the measured correlated attributes so as to generate at least one production principal component; and the at least one production principal component is compared to a principal component associated with a calibration process (a calibration principal component). The calibration principal component is obtained by measuring correlated attributes of a calibration process, and by performing principal component analysis on the measured correlated attributes so as to generate at least one principal component. A principal component having a feature indicative of at least one of a desired process state, process event and chamber state then is identified and is designated as the calibration principal component. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11410836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109188905-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007284246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015083328-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011022215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106876236-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10763144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7829468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007046927-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10262842-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7566900-B2 |
| priorityDate |
1999-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |