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publicationDate 2002-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002016060-A1
titleOfInvention Cerium oxide abrasive for polishing insulating films formed on substrate and methods for using the same
abstract The invention relates to an abrasive containing a slurry of the following cerium oxide grains as dispersed in water: n ( 1 ) Cerium oxide grains as obtained by adding hydrogen peroxide to an aqueous dispersion of cerium carbonate. n ( 2 ) Cerium oxide grains as obtained by oxidizing a precipitate, which is formed through addition of ammonium hydrogencarbonate to an aqueous solution of cerium nitrate, with hydrogen peroxide. n ( 3 ) Cerium oxide grains as obtained by neutralizing or alkalifying an aqueous solution of cerium ammonium nitrate.
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