Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21Y2115-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21W2131-403 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2637 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F21Y115-10 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate |
2018-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2023-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3785d03ba25c57ea1529cdb70d0c3de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117319d9441ca022455ce9347c2ae551 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77c2eaedd6e57f86fefff81e04e3bde7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29174db8a9f5d82a55dc05856c7628f1 |
publicationDate |
2023-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-11543445-B2 |
titleOfInvention |
Inspection apparatus |
abstract |
An inspection apparatus is provided to inspect an imaging device formed on an inspection object by bringing a contact terminal into electrical contact with a wiring layer of the imaging device while causing light to enter the imaging device. The light enters the imaging device from a back surface that is a surface on the side opposite to the side on which the wiring layer is formed. The inspection apparatus includes a substrate support made of a light-transmissive material and on which the inspection object is supported such that the substrate support faces a back surface of the imaging device, and a light irradiation mechanism disposed to be opposite to the inspection object with the substrate support interposed therebetween and having a plurality of LEDs such that light from the LEDs is oriented toward the inspection object. |
priorityDate |
2017-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |