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filingDate 2017-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2771af572eabff3d95a374a7bc238031
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publicationDate 2022-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11522098-B2
titleOfInvention UV/VIS/IR backside-illuminated photon-counting sensor
abstract Some embodiments of the present disclosure provide a semiconductor-based photon-counting sensor comprising a metal-insulator-semiconductor internal photoemission (e.g., thermionic-emission) detector formed on and/or in a first surface of a semiconductor substrate, and at least one jot formed on and/or in a second side of a semiconductor substrate. The at least one MIS photoemission detector and the at least one jot are configured such that a photocarrier generated in response to a photon incident on the MIS thermionic-emission detector is readout by the at least one jot.
priorityDate 2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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