| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da3b6ec3e3e092be5a8d375f17a6423b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B35-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B35-12 |
| filingDate |
2020-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5477cdf0f7b029013b23f60816e9bb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_954544ddf54e37576bf755921e31f5ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16f791ac2610476fbb6d98f21061dd43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2001a418ae6b3043d9eb2491197cf04f |
| publicationDate |
2022-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11518913-B2 |
| titleOfInvention |
Fluid composition and method for conducting a material removing operation |
| abstract |
A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish. |
| priorityDate |
2019-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |