http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11424129-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2018-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd51002d2916b9e19fc6e0e117e90e7f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c64071807e4d1e62b824f7e9a194acc4 |
| publicationDate | 2022-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-11424129-B2 |
| titleOfInvention | Method of etching boron-doped p-type silicon wafer, method of evaluating metal contamination of boron-doped p-type silicon wafer and method of manufacturing boron-doped p-type silicon wafer |
| abstract | The method of etching a boron-doped p-type silicon wafer includes preparing an etching gas by introducing an ozone-containing gas and hydrofluoric acid mist into a chamber and mixing them; and performing gas phase decomposition of a surface layer area of a boron-doped p-type silicon wafer with a resistivity of 0.016 Ωcm or less by bringing the etching gas into contact with a surface of the boron-doped p-type silicon wafer; and further includes introducing the ozone-containing gas into the chamber at a flow rate of 3,000 sccm or more; and preparing the hydrofluoric acid mist by atomizing hydrofluoric acid with a hydrofluoric acid concentration of 41 mass % or more. |
| priorityDate | 2018-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.