http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11322397-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-10323
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16b4dae340e743769c35707afb94b017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be9e8dd4d706687820ccff88534f99f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c5d1bb23d2f0d73d52d6654afaa99e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf3fe046a3cd61963af11036a41e6222
publicationDate 2022-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11322397-B2
titleOfInvention Method of manufacturing semiconductor devices including formation of adhesion enhancement layer
abstract In a method of manufacturing a semiconductor device, a first dielectric layer is formed over a substrate, an adhesion enhancement layer is formed on a surface of the first dielectric layer, and a second dielectric layer is formed on the adhesion enhancement layer.
priorityDate 2018-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016133512-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017178954-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018308793-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201618187-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019164748-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016372413-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003089678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016071801-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170009686-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017309514-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020111865-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017338192-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160045550-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013292794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017309497-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017317076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017018458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016111325-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002140103-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018315648-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017207083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018151422-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060010917-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015348835-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6338112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559503
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099666
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90455
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099809
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086

Total number of triples: 85.