| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_777a7d4b6d214f486f77cccc5afc193d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-407 |
| filingDate |
2021-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d5f49c2a01e60a41d79dadbd662acbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3745527bb768a8304b332d4e4f617688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c2760cec0f4e9ead9915e117e591877 |
| publicationDate |
2022-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11320393-B1 |
| titleOfInvention |
Gas sensor for detection of toxic gases |
| abstract |
A method of making an array of aligned hafnium oxide nanotubes is provided. The method includes generating a first reactant gas from a first solution comprising a first hafnium precursor dissolved in a first solvent. Directing the flow of the first reactant gas over a substrate to form a seed layer that comprises particles of hafnium oxide. The method further includes generating a second reactant gas from a second solution comprising a second hafnium precursor dissolved in a second solvent. Directing the flow of the second reactant gas over the seed layer to form the array of aligned hafnium oxide nanotubes substantially perpendicular on a surface of the substrate. A method of using the array of aligned hafnium oxide tubes for detection of toxic gases in a gas sample is also provided. |
| priorityDate |
2021-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |