Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_67d94c3351d9f83d3366cd855a39e7fc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-304 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-30 |
filingDate |
2017-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da4fa207b5402ad6822c4aa78be53a6a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eede21130f423d3c7f0614ff60b24c66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0d902f753e4b89f657ea58fa2f5ea9c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f79b847f876ad83bd236a183840ef22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9338eff78a2f7b13e3a7cf371b5a780 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_646d5e3c5c605e8495996e26fbd71a33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c145e0856fd9290361409e6428d18329 |
publicationDate |
2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-11268927-B2 |
titleOfInvention |
Electrochemical sensor, and a method of forming an electrochemical sensor |
abstract |
An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques. |
priorityDate |
2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |