Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_177dbc415b5ff5278e6b21ebc2abc75e |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4045 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-403 |
filingDate |
2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ba8d3cc3af73dcc8844a13866416269 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7993cf19fba492a3047a1ec81feb708c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb50f9901679bd4fe29403fc07c42f3d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_946018f52c147d6d9550818ee0d84c11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eeea8a0c4d1d099e631ee07a9439e231 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2319b92b1e5a82c2e4f714dec777b9f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59028a3dc29eaad45fed1c9d4e07ad77 |
publicationDate |
2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10620151-B2 |
titleOfInvention |
Electrochemical sensor, and a method of forming an electrochemical sensor |
abstract |
An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11268927-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11609207-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11022579-B2 |
priorityDate |
2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |