| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_373cff03eec945ef6bf4b72bfe39565c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eacd723d917dc9a6325b317d4dd0992c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0466
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54ef6ac15168df4bc997e1fbd9eab2a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bf8f596d0ada0ce9ed5d050c1cce02b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb78baa2f8e2c3bf2b240d68383c78c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaf1256c8d28e40e1cf2a0a9d971bb62 |
| publicationDate |
2021-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11211242-B2 |
| titleOfInvention |
System and method for cleaning contact elements and support hardware using functionalized surface microfeatures |
| abstract |
A cleaning material, device, and method for predictably cleaning the contact elements and support hardware of a tester interface, such as a probe card and a test socket, in which the cleaning pad has a predetermined configuration appropriate for the particular pin contact elements and a substrate having a defined functionalized surface topology and geometry which can be introduced into the testing apparatus during the normal testing operations. The cleaning material has a predetermined topography with a plurality of functional 3-dimensional (3D) microstructures that provide performance characteristics which are not possible with a non-functionalized and flat surface. |
| priorityDate |
2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |