http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11199769-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e489719c5433b26a9352e6ea776969ab
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-15
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
filingDate 2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e976fcd7ff1cd3a2718165ab66bb3ffa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb5ea767072b6827dbb63a2a42a8cc6c
publicationDate 2021-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11199769-B2
titleOfInvention Method and apparatus for neutral beam processing based on gas cluster ion beam technology
abstract A method of processing a trench, via, hole, recess, void, or other feature that extends a depth into a substrate to a base or bottom and has an opening by irradiation with an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials at the base or bottom of the opening.
priorityDate 2010-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099438-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018247831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6676989-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3679897-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6491800-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5883005-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006097185-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003021908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010226958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6511575-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007185488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008245974-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009074834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4713542-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009321658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003026990-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012045615-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018292745-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016233047-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010227523-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015091086-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7115511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005277246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4649273-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009140165-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011300599-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009087578-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6923891-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7504619-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6812147-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515392
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91865837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449377877
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24556
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022

Total number of triples: 94.