http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069681-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13086
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41725
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
filingDate 2019-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d93a219750a4bc00e5b5a2a3ebcccdec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fa620b06c86babf7024682a32a6c70a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fdc7d778736bfa3a2c4b8accd29ead8
publicationDate 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11069681-B2
titleOfInvention Integrated circuit device
abstract An integrated circuit (IC) device includes a fin-type active region extending lengthwise in a first direction, a plurality of nanosheets overlapping each other in a second direction on a fin top surface of the fin-type active region, and a source/drain region on the fin-type active region and facing the plurality of nanosheets in the first direction. The plurality of nanosheets include a first nanosheet, which is closest to the fin top surface of the fin-type active region and has a shortest length in the first direction, from among the plurality of nanosheets. The source/drain region includes a source/drain main region and a first source/drain protruding region protruding from the source/drain main region. The first source/drain protruding region protrudes from the source/drain main region toward the first nanosheet and overlaps portions of the plurality of nanosheets in the second direction.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11710738-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315938-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021313322-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021057553-A1
priorityDate 2019-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019019681-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9647098-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9412816-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10074573-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9825130-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10079303-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019051729-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017256609-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10217816-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9425293-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139070
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336889
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23992
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545355
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23912
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360835
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4227894
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5182128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419543920
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577457
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545753
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577453

Total number of triples: 74.