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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16481ebd7ecd848c6d57f243b1bde6bf
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publicationDate 2021-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10927460-B2
titleOfInvention Raw material for forming thin film, and method for manufacturing thin film
abstract In the formula, R1 represents a linear or branched alkyl group having 2 to 4 carbon atoms; R2 to R5 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms; A represents an alkanediyl group having 1 to 4 carbon atoms; and M represents titanium, zirconium or hafnium. Provided that when M represents zirconium, A represents an alkanediyl group having 3 or 4 carbon atoms. When M represents titanium or hafnium, it is preferred that A represents an alkanediyl group having 2 or 3 carbon atoms. When M represents zirconium, it is preferred that A represent an alkanediyl group having 3 carbon atoms.
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