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publicationDate 2021-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10916473-B2
titleOfInvention Method of cleaning wafer after CMP
abstract A method includes forming a first dielectric layer over a wafer, etching the first dielectric layer to form an opening, filling a tungsten-containing material into the opening, and performing a Chemical Mechanical Polish (CMP) on the wafer. After the CMP, a cleaning is performed on the wafer using a weak base solution.
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