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filingDate 2018-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10879299-B2
titleOfInvention Semiconductor device with transistor in semiconductor substrate and insulated contact plug extending through the substrate
abstract A semiconductor device including a semiconductor substrate having a first surface and a second surface that face each other, and having an element region and an isolation region, the element region including a transistor in the first surface, and the isolation region including an element isolation layer surrounding the element region; and a contact plug extending from the first surface to the second surface in the isolation region of the semiconductor substrate.
priorityDate 2013-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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