| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-48 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-54 |
| filingDate |
2017-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547169be3b25e95983293ac91e361d1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192 |
| publicationDate |
2020-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10774436-B2 |
| titleOfInvention |
High purity aluminum top coat on substrate |
| abstract |
A chamber component for a processing chamber comprises an article having impurities, an aluminum coating on a surface of the article, wherein the aluminum coating is substantially free from impurities, and an anodization layer over the aluminum coating. The anodization layer comprises aluminum oxide. The anodization layer further comprises a dense barrier layer portion and a porous columnar layer portion. |
| priorityDate |
2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |