http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10242877-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-11582
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11582
filingDate 2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe7cabccc2978c9c792f0a0938cc373b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54a1c9be33001645bc638fb4020e5e01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8199e734b1815734ebbdc2306e15898
publicationDate 2019-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10242877-B2
titleOfInvention Aluminum compound and methods of forming thin film and fabricating integrated circuit device by using the same
abstract Provided are an aluminum compound represented by General Formula (I), a method of forming a thin film, and a method of fabricating an integrated circuit device.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11647628-B2
priorityDate 2016-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015146341-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6743475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011287612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005239297-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8835273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7615250-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8455672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7462559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101221861-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013078454-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013166965-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9064900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9269574-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415725167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559503
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447470423
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452894838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157881282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415743393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393705
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69650
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458073913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID471672982
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466192501
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157054510
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16682930
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16683070
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5182128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457000845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518510
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7277
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448546658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434036
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42619
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707642
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426228063
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640

Total number of triples: 98.