| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-642 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8256 |
| filingDate |
2016-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f18cadd1a0fe10eedcd09a90cb35f69e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a5594c77d13669fbcabcdd14cd6b922
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea70bf66e7b0319b31b5f907c619d85b |
| publicationDate |
2018-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10164003-B2 |
| titleOfInvention |
MIM capacitor and method of forming the same |
| abstract |
A method of forming a metal-insulator-metal capacitor is provided. The method includes forming a first metal plate over a semiconductor substrate, forming a first dielectric layer with a first dielectric constant on a surface of the first metal plate, forming a second dielectric layer with a second dielectric constant on a surface of the first dielectric layer, forming a third dielectric layer with a third dielectric constant on a surface of the second dielectric layer, and forming a second metal plate on a surface of the third dielectric layer. The second dielectric constant is different from the first dielectric constant and different from the third dielectric constant. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11502160-B2 |
| priorityDate |
2016-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |