| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d21cbff64022f95c237c0bd3ec8656ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2252-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D137-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D137-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| filingDate |
2015-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bab73af92a137f2b238ed9152cfa35bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04611b31e95c2b267edcf61cfd3a59d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68380cd8ca93d89eaab15e7c88fd6b0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b511201f28ad4a6354e8a09b2a2f3000
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13df937234e701694cd52c19c3a26a91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_862ea8a31bd6fd10d70728a9f5ad1319
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdbcb12b79dccbee7726e44bde939f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05d732e682c19a150b984ba6f19ff2ae |
| publicationDate |
2018-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10139724-B2 |
| titleOfInvention |
Anhydride copolymer top coats for orientation control of thin film block copolymers |
| abstract |
The concepts described herein involve the use of random copolymer top coats that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films. Top coats potentially allow for the facile orientation control of block copolymers which would otherwise be quite challenging. |
| priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |