| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6caea61bfde8a45e01a8deabff80d97 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C13-0004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C13-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L45-1666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L45-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L45-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L45-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L45-149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C11-5678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4983
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L45-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C11-5685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C13-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4925
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-24 |
| filingDate |
2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96473ffa1096c92c6332ffb8542f845a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b500774ea0fc280979dd1fd97a8ce77b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_871c8558b839d34491906325df585596 |
| publicationDate |
2018-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10121965-B1 |
| titleOfInvention |
Resistive random access memory device containing discrete memory material portions and method of making thereof |
| abstract |
An alternating stack of insulating layers and electrically conductive layers is formed over a substrate. Sidewalls of the electrically conductive layers are laterally recessed to form laterally recessed regions. After formation of a conformal barrier material layer in the laterally recessed regions and on the sidewalls of the insulating layers, an amorphous precursor memory material layer is deposited in lateral cavities and over the conformal barrier material layer. An anneal process is performed to selectively crystallize portions of the amorphous precursor memory material layer in the lateral cavities into crystalline memory material portions while not crystallizing portions of the amorphous precursor memory material outside the lateral cavities. Remaining amorphous portions of the amorphous precursor memory material layer are removed selective to the crystalline memory material portions. A vertical conductive line is formed on the crystalline memory material portions. The crystalline memory material portions are formed as discrete self-aligned material portions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11652148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11121140-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11502104-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11239254-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022367648-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049880-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11538817-B2 |
| priorityDate |
2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |