Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4b9d3b5f7fd5be30c4969c53aeee678e |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-763 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3293 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-457 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-457 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
filingDate |
2013-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cae763b60e1f23677ccd713a95567fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7090c038cf73573f5cc84884d4578e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79153e1291e7289b49bb3c46b022b6fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbb8ed47d5ab8e3600a2b29531725b64 |
publicationDate |
2018-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-10090136-B2 |
titleOfInvention |
Oxide sintered body and sputtering target, and method for producing same |
abstract |
An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn 2 SnO 4 phase and an InGaZnO 4 phase are the main phases and that an InGaZn 2 O 5 phase is contained in an amount of 3 volume % or less. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10515787-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016111264-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735403-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11081326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11104615-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11091832-B2 |
priorityDate |
2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |