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publicationNumber US-10090136-B2
titleOfInvention Oxide sintered body and sputtering target, and method for producing same
abstract An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn 2 SnO 4 phase and an InGaZnO 4 phase are the main phases and that an InGaZn 2 O 5 phase is contained in an amount of 3 volume % or less.
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