http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10049933-B2

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filingDate 2017-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d870adf7a4eb23dd24692aa4c17cab
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publicationDate 2018-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10049933-B2
titleOfInvention Element chip manufacturing method
abstract An element chip manufacturing method includes a preparation process of preparing a substrate which includes a first surface provided with a bump and a second surface and includes a plurality of element regions defined by dividing regions, a bump embedding process of adhering a protection tape having an adhesive layer to the first surface and embedding. The element chip manufacturing method includes a thinning process of grinding the second surface in a state where the protection tape is adhered to the first surface and thinning the substrate, after the bump embedding process, a mask forming process of forming a mask in the second surface and exposes the dividing regions, after the thinning process, a holding process of arranging the first surface to oppose a holding tape supported on a frame and holding the substrate on the holding tape.
priorityDate 2016-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 46.