| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B2220-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B5-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B51-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B55-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B31-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3497
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D81-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65B5-045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D81-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D81-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2019-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99aaa32cd1279b8f33bce9c6138f9476 |
| publicationDate |
2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I748265-B |
| titleOfInvention |
Manufacturing method and transportation method of sputtering target packaging |
| abstract |
The present invention provides a method for producing a package capable of effectively suppressing surface deterioration even in sputtering targets such as sputtering targets containing boron oxides whose surfaces are easily deteriorated by moisture. The manufacturing method of the package of the sputtering target includes: Step 1. After storing the sputtering target in a first packaging bag formed of a film with a water vapor permeability of 1g/(m 2 ･24h) or less, the first The opening of the packaging bag is vacuum sealed; in step 2, the first packaging bag vacuum-sealed in step 1 is placed in a second packaging bag formed of a film with a vapor permeability of 1g/(m 2 · 24h) or less After that, one or two or more buffer gases selected from the group consisting of air and inert gas are packaged in the second packaging bag, and the opening of the second packaging bag is sealed. A method of transporting the packaging of the sputtering target is also provided here. |
| priorityDate |
2019-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |