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filingDate 2018-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I744522-B
titleOfInvention Methods for gapfill in high aspect ratio structures
abstract Methods for seam-less gapfill comprising depositing a film in a feature, treating the film to change some film property and selectively etching the film from the top surface are described. The deposition, treatment and etching are repeated to form a seam-less gapfill in the feature.
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