http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I719160-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5f4c353e9448cb66e627017e92500ff |
| publicationDate | 2021-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I719160-B |
| titleOfInvention | Plasma etching method |
| abstract | The plasma etching method of the present invention includes a deposition step of forming a thin film by making the inside of the processing container into a gas environment containing a first processing gas and a second processing gas, the first processing gas containing fluorine atoms and/or carbon atoms The second processing gas system has a rare gas as the main component; and the etching step, which makes the processing container into a gas environment containing at least the second processing gas, and plasma etching is performed on the substrate to be processed; The deposition step and the etching step are alternately implemented, and the deposition step includes: when the gas environment in the processing container contains the first and second processing gases, the gas environment contains carbon atoms on a mass basis. 2.4 times to 3.1 times the fluorine atom. |
| priorityDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.