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filingDate 2018-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f2737ecbb95b3d645080ecb8c465926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_074623a621db50c0f16fc026201e93f0
publicationDate 2020-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I689000-B
titleOfInvention Masking material for plasma cutting, mask-integrated surface protection tape and method for manufacturing semiconductor wafer
abstract The present invention is a method for manufacturing a masking material for plasma cutting, a mask-integrated surface protection tape, and a semiconductor wafer. The masking material for plasma cutting is used in a plasma step, and the above masking material is not adhered to The surface roughness Rz on the side of the body contact surface is 0.1 μm to 1.5 μm.
priorityDate 2017-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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