| abstract |
A coating liquid for forming an oxide or oxynitride insulator film, including at least one of the A element, the B element, and the C element, and a solvent; the aforementioned A element is selected from the group consisting of Sc, Y, and Ln( Lanthanides), Sb, Bi and Te at least one group; the aforementioned B element is at least one selected from the group consisting of Ga, Ti, Zr and Hf; the aforementioned C element is selected from the group consisting of At least one of the group consisting of Group 2 elements in the table; the aforementioned solvent is at least one selected from the group consisting of an organic solvent and water containing a flash point of 21°C or higher and lower than 200°C. |