| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e79c7785ed9b1eff8a47b93114f35c27 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-02 |
| filingDate |
2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f247663ae65bab9acc3887d042e9766a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47e4b44a1c1273edc834f0f933e97345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90d992a04244d755d16bd9334af4fed6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_483fc5e2be593ae764278c58dc0fc45a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d024e76921cb51e5094157001e8b9252 |
| publicationDate |
2019-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I671344-B |
| titleOfInvention |
Overcoat layer composition and method for photo lithography |
| abstract |
A topcoat composition suitable for application over a photoresist composition is provided. A preferred topcoat composition includes a first polymer including: (i) a first unit including a nitrogen-containing moiety that includes an acid labile group; and (ii) ) A second unit, which (1) includes one or more hydrophobic groups and (2) is different from the first unit. |
| priorityDate |
2015-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |