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publicationDate 2019-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I661269-B
titleOfInvention Photoresist composition, compound and photoresist pattern manufacturing method
abstract A photoresist composition includes: a resin having an acid-labile group, an acid generator, and a compound represented by formula (I): Wherein R 1 , R 2 and R 3 each independently represent a C1-C24 hydrocarbon group, wherein a hydrogen atom may be replaced by a substituent, and a methylene group thereof may be replaced by an oxygen atom, a sulfur atom, or a carbonyl group.
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