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filingDate 2016-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I630683-B
titleOfInvention Semiconductor device formed by closed epitaxial growth technique
abstract A semiconductor device comprising: an isolation region laterally defining an active region in a semiconductor substrate; a gate structure over the active region; and a sidewall spacer adjacent to a sidewall of the gate structure. An etch stop layer is disposed over a portion of the active region to cover the active region, an interlevel dielectric material is over the active region to cover the etch stop layer, and a source/drain region having a closed bump is located at the active The surface above the surface is in contact with the upper surface of the active area. a source/drain region of the hermetic ridge contacting at least a portion of a sidewall surface portion of the sidewall spacer and a sidewall surface of the etch stop layer and extending laterally therebetween, and a conductive contact member extending through the interlayer dielectric material It is in direct contact with the upper surface of the source/drain region of the closed ridge.
priorityDate 2015-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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