| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-1931
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-1951 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c751339139aeee5783240c2dd68a99b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d36d521f7f0e840944a8f9c6f94506b |
| publicationDate |
2018-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I621196-B |
| titleOfInvention |
Faraday shield control temperature |
| abstract |
The present invention provides a method for controlling the thermal cycle of a Faraday shield in a plasma processing chamber. The method includes: performing a first plasma processing operation on a first wafer in the plasma processing chamber; terminating the first plasma processing operation; performing a first wafer transfer operation to convert the first Wafers are transferred out of the chamber; and, during the first wafer transfer operation, power is applied to a TCP coil in a plasma restricted state. |
| priorityDate |
2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |