http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I618139-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2013-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8073fab7bc6a8a78b49e72b9a6f881fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94879ef4d212a86d39c2a2c1e747f063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22bcd094ebdfa82011177aed84e9bbc8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11cdfc8f017c8e4db0c41671cf4e030c |
| publicationDate | 2018-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I618139-B |
| titleOfInvention | 矽-carbon-nitride selective etching |
| abstract | A method of etching a patterned germanium-containing nitrogen-and-carbon material on a patterned heterostructure is described, the method comprising remote plasma etching formed from a fluorine-containing precursor and an oxygen-containing precursor. The plasma effluent from the remote plasma flows into the substrate processing zone where the plasma effluent reacts with the exposed areas containing the -矽-nitrogen-and-carbon material. The plasma effluent reacts with the patterned heterostructure to selectively remove the yttrium-nitrogen-and-carbon material from the exposed yttrium-nitrogen-and-carbon material region while removing the selected material very slowly Other exposed materials. |
| priorityDate | 2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 65.