| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2013-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9984a320e8f6c2290184108ec6a530b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aaa94fc712b333a3b0b705bcc6173c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8de14c03f9dc367ec002a3c58bc3259e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_608425a31bd7de20386ae95da4e23e4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6defe81c812094252b7835a6cd82e54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64fc226e45ad8083fbc3f7aa75a9f762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4beb5ee0ed4fd17822a559ddd9c4536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e72fd8cedb1b73d5008f3c2d1ab3be7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f36760f2f40adf04ac588c8e4eb164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d924ab8eaef43ee237c8e3030e803535 |
| publicationDate |
2017-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I596671-B |
| titleOfInvention |
Etching with mixed mode pulsation |
| priorityDate |
2012-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |