| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-1134 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fec1103ba4c8221dae1e477c45d0dee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b32c8db95a49694bc02383d44f6321a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f1b578d48eec80f9e3eadfad4a7dcf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_537403d48bc364c576e78e71a7317f52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_617d706ac692b8f23a7925ee1b817820 |
| publicationDate |
2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I575598-B |
| titleOfInvention |
In-situ chamber cleaning with an inert hydroquinone mixture during wafer processing |
| priorityDate |
2013-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |