| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22D21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22D21-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22D27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22D21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22F1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3423 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2014-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2508620c7356033d1007d79cbd24d7d5 |
| publicationDate |
2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I558833-B |
| titleOfInvention |
Sputtering target and its manufacturing method |
| priorityDate |
2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |