| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2009-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54c5af3830ea699941b673435840f9dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_614d12a0c9d4a5951bd13b04ec620a67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8764b83fc3ae53a0d045f7761327898a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6e3c6f166919b09ad739bfab286cc40 |
| publicationDate |
2016-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I557799-B |
| titleOfInvention |
Method for oxidizing a semiconductor device |
| priorityDate |
2008-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |