| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdf3b6ced3d7710ec0bc0addb67a1cc9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66772
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78621 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
| filingDate |
2009-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8342d8f9b388d783b21852d7ac17f95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f97d170713d7d81cd5cc6b13bcbfff94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50dad704d0567da2f2c493c3bef81d8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15691f2fdebca61994319388511d9657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb7fd38e08f1539d1f8f058dd7886ece |
| publicationDate |
2016-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I538111-B |
| titleOfInvention |
Method for manufacturing SOI substrate |
| priorityDate |
2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |