| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C11-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_383d8f450756a16f0370b4c87f2843c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c634ad3eccfdb29049bd21c6678d59a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5097db02ce54173dfc42869351e2d2d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55c37026b0967316c7c073ae7a022bc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a8cc50ce7b79311d14eee05345f709b |
| publicationDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I528451-B |
| titleOfInvention |
Plasma processing method |
| priorityDate |
2012-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |