| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70191c98719c658f3f5203fad1731395 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2011-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38eed6e87b74238bb6c114c04a0fbd65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bea09df0333815402f343748a5ecb17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6766b4e8a7d168fd3ec2b059a074bfad |
| publicationDate |
2016-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I523100-B |
| titleOfInvention |
Plasma etching method |
| priorityDate |
2010-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |