http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I518771-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2010-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c6b4c28fed33fa5db7c182b7644bf7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1d510780d2b2063922dc1e15dea2bc1 |
| publicationDate | 2016-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I518771-B |
| titleOfInvention | Etching method |
| priorityDate | 2009-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.