| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2011-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4a0979b376f798ac33909239383c646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8fc29bfb0eb0cea816ebb7fd9d616f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51e8aaa2ac43d56789084bb7ec4bc89f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a951a38a492289161f08a8090329ba68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_410eb3d7a5082e7ef63f384ddab779cb |
| publicationDate |
2015-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I500066-B |
| titleOfInvention |
Plasma processing device |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I620227-B |
| priorityDate |
2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |