| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H1-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2009-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51e2f5643edb8d380bc024d45d0e1e35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_749dd9e7a996a9a2c9029e6df48bc0b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0350240936666a7cbcd68cea424aca2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7470fb66e90497c4b09c779900019808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b594ca4f64548c1ed03e6328feb94b30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9745c78cf5cf0e3772cec10f1cf82b9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d96a6830df946764e57fbff175cd6583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f588f0c9ef769f54ee9e476bc11807fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02b4be44e61d9398e6146ed3f5854444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37d3781f30d8527f6630bd1f6d0243bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb5dfa5ddc1212f1ebf0d8396fa80327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc80f3a0b7ebe7a711c277ba5dcf1961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d7c905ae485acd1645823b0638b71bd |
| publicationDate |
2015-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I484577-B |
| titleOfInvention |
Etch reactor suitable for etching high aspect ratio features |
| priorityDate |
2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |