| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2012-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8a97406eacb09f80a3262e93c926876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff73be6190b47d8e8ae0d367811f6284
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99d7e593f2b25b4fee963e09f0937d80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfb170c3ccff5bb8052e86c3c709a581 |
| publicationDate |
2015-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I483309-B |
| titleOfInvention |
Etching method and etching equipment |
| priorityDate |
2011-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |