| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B15-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04 |
| filingDate |
2008-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47991a46fdaef3120411c8a48bdb83aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c815017dc9a2d7b72bb26f12dd18c6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb84b0cbbc1a00dd5c09e53c29b4d13c |
| publicationDate |
2015-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I476827-B |
| titleOfInvention |
Aluminized component of semiconductor material processing equipment and method of manufacturing the same |
| priorityDate |
2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |