| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf498f46f080cc8bab9e8ddde083950e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab6d1687e26e780aefa9c02d61cd3011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75ceab061ddfc71776011c0367e71a8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd9e2325b3dae2929157b731a1a57eda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf767f757d0773a74077372acfdf7164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aadb3cd222ee8a42f5dea30c4ff6e168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6433952805e1cde3a698f1bc1c444020
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb483b72e0b1262f6aef65bc7068be8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cee852ee9f15f27f17190d71b514ba40 |
| publicationDate |
2015-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I469211-B |
| titleOfInvention |
Fabrication of tantalum structures and deep etching by contour control |
| priorityDate |
2007-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |